Claughton Miller & Associates provide high quality, ultra pure, colloidal silica slurries suitable for several applications within semiconductor manufacturing processes including CMP of semiconductor wafers.
High Purity Colloidal Silica Slurries:
- Made from high purity silicon powder
- Designed for low sodium content
- Low metal content
- Generates angstrom level finish of polished surface
- Suitable for polishing process of semiconductor wafers, hard disk drive substrates and media disks, fiber optic connectors, etc
Colloidal Silica Slurries Typical Properties
| Item |
Alkaline slurry |
Acidic slurry |
| Particle size (nm) |
20-40; 40-60; 60-80; 100-140 |
15-35 |
| Appearance |
Milky white liquid |
Milky white liquid |
| Density (g/ml) |
1.15 |
1.15 |
| pH |
9.8±0.5 |
2-3 |
|
